Microplasma analytical sensor for gas mixtures diagnostics
- 1 — Saint Petersburg State Mining University
- 2 — Saint Petersburg State Mining University
Abstract
Theoretical consideration of collision electron spectroscopy (CES) for gaseous media analysis and experimental results on CES detector are presented. It is demonstrated that a diffusion path confinement for characteristic electrons provides a possibility to measure electrons energy distribution function and to find characteristic spectra of species at high (up to atmospheric) gas pressure. Simple micro-plasma CES detector of two plane parallel electrode configuration with current-voltage measurement in afterglow of helium glow discharge may be designed to operate at a high gas pressure up to atmospheric one. Experimental electron energy spectra of pair He metastables collisions in dependence of interelectrode gap are discussed.
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