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Vol 186
Pages:
253-256
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RUS

Using of electric field for manufacturing and nondestructive testing of a capacitor sensors and actuators

Authors:
N. S. Pshchelko1
V. V. Buevich2
About authors
  • 1 — Ph.D. Saint Petersburg State Mining Institute (Technical University)
  • 2 — Student Saint Petersburg State Mining Institute (Technical University)
Date submitted:
2009-08-25
Date accepted:
2009-10-24
Date published:
2010-02-01

Abstract

Some designs of capacitor sensors and actuators which work is based on electric field use are considered. It is shown that these designs are rather cheap in manufacturing, but thus possess good technical characteristics. The theoretical substantiation of possibility of electrostatic forces use for balancing of a pressure difference in the corresponding measuring device is adduced. Procedure for definition of parameters of a condenser structure cap is considered. The procedure allows by means of one operation – volt-capacitance characteristic measuring – to define the whole complex of the major parameters of a cap-size of a working air gap, a membrane deflection, surface electret potential and a membrane tension. Analytical expression for capacitance of a cap depending on the specified parameters and measuring of its volt-capacitance characteristic allow to define these parameters by solving corresponding system of equations. The procedure considered in the present work is a method of a not-destroying control.

Keywords:
electric field capacitor transducers non-destructive control
Пщелко Н.С., Буевич В.В. Использование электрического поля для получения и неразрушающего контроля емкостных сенсоров и активаторов // Записки Горного института. 2010. Т. 186 . С. 253-256.
Pshchelko N.S., Buevich V.V. Using of electric field for manufacturing and nondestructive testing of a capacitor sensors and actuators // Journal of Mining Institute. 2010. Vol. 186 . p. 253-256.
Go to volume 186

References

  1. Ганенков Н.А. Электретные электромеханические преобразователи / Н.А.Ганенков, Н.С.Пщелко // Радиоэлектроника в СПбГЭТУ. 1996. Вып.2. С.121-126.
  2. Закржевский В.И. Методические указания к курсовым проектам по дисциплине «Расчет и конструирование полупроводниковых и диэлектрических структур» / В.И.Закржевский, О.И.Колдунов, Н.С.Пщелко; СПбГЭТУ «ЛЭТИ». СПб., 1992. 20 с.
  3. Модификация термостойких фотолаков для новых областей применения / Н.В.Климова, Г.К.Лебедева, Л.И.Рудая, Т.А.Юрре, И.М.Соколова, Н.С.Пщелко // Петербургский журнал электроники. 2002. № 3. С.33-37.
  4. Пат. № 2132116 РФ H 04 R 29/00. Способ определения качества электретных и электроакустических преобразователей и устройство для его реализации / Ф.И.Баталов, Н.С.Пщелко, А.С.Ястребов. Опубл. 27.05.99. Бюл. № 17. Ч.2.
  5. Пщелко Н.С. Методика расчета электретных приемных электроакустических преобразователей / Н.С.Пщелко, В.Н.Таиров // Акустический журнал. 1988. Т. 34, №4. С. 706-710.
  6. Пщелко Н.С. Оптимизация параметров электретных микрофонов / Н.С.Пщелко, Д.А.Козодаев // Изв. СПбГЭТУ «ЛЭТИ». 1997. Вып. 504. С. 87-92.
  7. Теория и расчет электромеханических преобразователей на активных диэлектриках: Учеб. пособие / Н.А.Ганенков, В.И.Закржевский, О.И.Колдунов, Н.С.Пщелко; СПбГЭТУ «ЛЭТИ». СПб., 1994. 43 с.
  8. Kozodaev D.A. Analysis of Electert Sub-Miniature Microphones / D.A.Kozodaev, N.S.Pshchelko, V.I.Zakrzhevskiy // Proc. ISE –10. Athens. 1999. P. 973-978.
  9. Pshchelko N.S. Sensitivity Stability of Electret Transducers / N.S.Pshchelko, V.N.Tairov, A.R.Ozols // Proc. ISE–7. Berlin. 1991. P.935-940.
  10. Pshchelko N.S. C-V – Testing of Electeret Transducers / N.S. Pshchelko, I.M. Sokolova, V.I. Zakrzhevskiy // Proc. ISE –8, Paris. 1994. P.1028-1033.

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