Method of measurement of anisotropic electron velocity distribution function
About authors
- 1 — Ph.D., Dr.Sci. professor Saint Petersburg State Mining University
- 2 — post-graduate student Saint Petersburg State Mining University
Abstract
The method of local anisotropic plasma has been developed. The mathematical apparatus of the method for rapid analysis of the degree of anisotropy electron distribution function, as one of the main characteristics of anisotropic plasma has been proposed. It has been demonstrated that the degree of anisotropy of the plasma can be determined only by the form of the IU curve (the second derivative of probe current to the probe potential). The possibilities of the method in area of reconstruction of the full distribution function have been illustrated.
Область исследования:
(Archived) Nanotechnologies and information technologies
Funding:
None
References
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- Lapshin V.F. Method of flat one-sided probe for anisotropic plasma diagnostics / V.F.Lapshin, A.S.Mustafaev // Zh. techn. fiz. 1989. Vol.59. N 2.
- Fedorov V.L. About the EVDF measurements in axially-symmetric plasma / V.L.Fedorov, A.P.Mezentsev // Zh. techn. fiz. 1987. Vol.57. N 3.
- Godyak V.A. Plasma-Surface interaction and processing of materials. Deventer: Kluwer, 1990.
- Demidov V.I., Kolokolov N.B., Kudryavtsev A.A. Probe methods for low-temperature plasma investigation. Moscow, 1996.
- Pfau S., Tichy M. Low temperature plasmas: fundamentals, technologies and techniques / Ed. by R.Hippler. Berlin, 2008.
- Lieberman M. Plasma processing for nanoelectronics // 63rd gaseous electronics conference & 7th international conference on reactive plasmas: Contr. Pap., 2010. Paris, France, 2010. Vol.55. N 37.
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