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Vol 189
Pages:
264-267
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RUS

Non-destructive strength testing of anodic bonding conductor-to ionic dielectric seals

Authors:
N. S. Pshchelko
About authors
  • Saint Petersburg State Mining Institute (Technical University)
Date submitted:
2010-07-05
Date accepted:
2010-09-10
Date published:
2011-01-01

Abstract

Physical processes that lead to the emergence of large forces of attraction between bodies, joined by anodic bonding technology result from the large electric fields strengths at the ontact interface. Nondestructive method of monitoring the strength of obtained conductor-to ionic di- electric anodic bonding seals is based on the relationship between the dependence of  current versus time flowing in the formation of seals and the strength of the resulting seals.  Theoreti cally justified a new technological method for manufacturing of  high-quality  anodic  bonding seals. The results obtained are confirmed experimentally.

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References

  1. Влияние постоянного электрического поля на процессы осаждения тонких металлических пленок платины методом ионно-плазменного распыления / В.П.Афанасьев, Д.А.Чигирев, Н.С.Пщелко, Н.П.Сидорова // Известия вузов России. Радиоэлектроника. СПб, 2010. Вып.6. С.59-65.
  2. Нагорный В.С. Анализ динамики процесса формирования электроадгезионного контакта / В.С.Нагорный, Н.С.Пщелко, Н.П.Сидорова // Научно-технические ведомости СПбГПУ. Сер. Информатика, телекоммуникации, управление. 2009. № 6. С.166-170.
  3. Пщелко Н.С. Влияние шероховатости поверхностей электроадгезионного контакта на его силовые характеристики / Н.С.Пщелко, Т.В.Стоянова // Цветные металлы. 2008. № 5. С.51-57.
  4. Сетчатые иерархические пористые структуры с электроадгезионными контактами / И.Е.Грачева, С.С.Карпова, В.А.Мошников, Н.С.Пщелко // Известия СПбГЭ- ТУ. СПб, 2010 № 8. С.27-32.

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