Procedure for determination of parameters of a condesing structures with a movable capacitor plates

Abstract

Procedure for definition of parameters of a condenser structure cap is considered. The procedure allows by means of one operation – volt – capacitance characteristic measuring – to define the whole complex of the major parameters of a cap – size of a working air gap, a membrane deflection, surface electret potential and a membrane tension. The expressions for capacitance of a condenser structure cap as a function of specified parameters are obtained. Analytical expression for capacitance of a cap depending on the specified parameters and measuring of its volt-capacitance characteristic allow to define these parameters by solving corresponding system of equations. The procedure considered in the present work is a not-destroying quality monitoring method.