Electrical methods for nondestructive quality control of capacitors metal-oxide structures
- 1 — Saint Petersburg State Mining Institute (Technical University)
- 2 — Herzen Russian State pedagogical university
The paper presents a number of experimental techniques for detecting in amorphous tantalum oxide films structural defects, which accelerate film destruction processes in a strong electric field and thus are potentially dangerous under prolonged thermoelectric stresses applied to capacitor structures. It is shown that the anomalous frequency dependence of dielectric losses and increase of the leakage current over time can identify potentially unreliable capacitors.