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Microplasma analytical sensor for gas mixtures diagnostics

A. S. Mustafaev1
A. B. Tsyganov2
  • 1 — Saint Petersburg State Mining University
  • 2 — Saint Petersburg State Mining University
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Date published:


Theoretical consideration of collision electron spectroscopy (CES) for gaseous media analysis and experimental results on CES detector are presented. It is demonstrated that a diffusion path confinement for characteristic electrons provides a  possibility to measure electrons energy distribution function and to find characteristic spectra of species at high (up to atmospheric) gas pressure. Simple micro-plasma CES detector of two plane parallel electrode configuration with  current-voltage measurement in afterglow of helium glow discharge may be designed to operate at a high gas pressure up to atmospheric one. Experimental electron energy spectra of pair He metastables collisions in dependence of interelectrode gap are discussed.

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